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真空计和控制器

瑞士Inficon英福康
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真空计和控制器

皮拉尼真空计 PSG50x & PSG51x 大气压至中真空真空计PSG500

产品咨询：

19332356985(周总)

产品简介

皮拉尼真空计

PSG50x & PSG51x

大气压至中真空真空计

INFICON Pirani 标准真空计 PSG500、PSG502-S、PSG510-S 和 PSG512-S 采用当今市场上最先进的数字 Pirani 技术，不锈钢传感器单元坚固耐用，结构设计紧凑，适用于半导体系统和标准应用，例如前级真空管。

优势

轻松一键调节 ATM 和 HV
节省空间的坚固设计
铝质壳体
可安装在任何方向
不锈钢测量单元，带金属密封馈入装置
对数信号输出，易于集成
螺纹接头，具有 10 bar 绝对过压能力
250°C 可烘烤装置
镍丝选件，适用于腐蚀性应用
陶瓷馈入装置，适用于腐蚀性极强的应用（PSG510 和 PSG512)
可选设定点
符合 RoHS 标准

典型应用

高真空电离真空计控制
前级真空压力监控
真空系统中的安全电路
高真空和低真空范围内的一般真空测量和控制

规格

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading	±15%
5 x 10-4 … 1 x 10-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	none
Setting range	mbar	‒
Hysteresis	% of reading	‒
Relay contact		‒
Relay contact: Switching time	ms	‒

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading
5 x 10-4 … 1 x 10-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading
5 x 10-4 … 1 x 10-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading
5 x 10-4 … 1 x 10-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading
5 x 10-4 … 1 x 10-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435

零件编号

配件

备件

旧传感器版本的备件

PSG500 tungsten

350-160	PSG500 DN 16 ISO-KF.
350-161	PSG500 1/8" NPT
350-162	PSG500 DN 16 CF-R
350-163	PSG500 1/2" Tube
350-164	PSG500 8-VCR (1/2")
350-165	PSG500 4-VCR (1/4")
350-166	PSG500 7/16-20 UNF
350-167	PSG500 DN 16 ISO-KF, ext. body
350-168	PSG500 DN 16 CF-R, ext. body

PSG500-S tungsten, setpoints

350-180	PSG500-S DN 16 ISO-KF
350-181	PSG500-S 1/8" NPT
350-182	PSG500-S DN 16 CF-R
350-183	PSG500-S 1/2" Tube
350-184	PSG500-S 8-VCR (1/2")
350-185	PSG500-S 4-VCR (1/4")
350-187	PSG500-S DN 16 ISO-KF, ext. body

PSG502-S nickel, setpoints

350-240	PSG502-S DN 16 ISO-KF
350-241	PSG502-S 1/8" NPT
350-244	PSG502-S 8-VCR (1/2")
350-245	PSG502-S 4-VCR (1/4")
350-247	PSG502-S DN 16 ISO-KF, ext. body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-210	PSG510-S DN 16 ISO-KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-310	PSG512-S DN 16 ISO-KF

零件编号

配件

备件

旧传感器版本的备件

PSG500 tungsten

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG500-S tungsten, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG502-S nickel, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG510-S tungsten, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG512-S nickel, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

零件编号

配件

备件

旧传感器版本的备件

PSG500 tungsten

350-820	PSG500 Spare Sensor DN 16 KF

PSG502-S nickel, setpoints

350-800	PSG502 Spare Sensor DN 16 KF

零件编号

配件

备件

旧传感器版本的备件

PSG500 tungsten

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG500-S tungsten, setpoints

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG502-S nickel, setpoints

350-900	PSG502 Spare Sensor DN 16 KF
350-901	PSG502 Spare Sensor 1/8" NPT
350-902	PSG502 Spare Sensor DN 16 CF-R
350-903	PSG502 Spare Sensor 1/2" Tube
350-904	PSG502 Spare Sensor 8-VCR (1/2")
350-905	PSG502 Spare Sensor 7/16-20 UNF
350-906	PSG502 Spare Sensor 4-VCR (1/4")
350-907	PSG502 Spare Sensor DN 16 KF,ext.body
350-908	PSG502 Spare Sensor DN 16 CF-R,ext.body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-930	PSG510 Spare Sensor DN 16 KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-940	PSG512 Spare Sensor DN 16 KF