真空计和控制器

产品中心

PRODUCTS CENTER

真空计和控制器

产品咨询：

冷阴极真空计

倒置磁控真空计

倒置磁控真空计MAG470适用于所有超高真空应用。测量范围为 5x10-11 mbar 到 1x10-2 mbar.

MAG470

MAG470 extended

测量范围 (air, N2)	mbar Torr	5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3

精确度
1x10-9 ... 1x10-3 mbar	% of reading	≈±30

重复性
1x10-9 ... 1x10-3 mbar	% of reading	≈±5

温度
操作 (ambient)	°C	+5 ... +55
储存	°C	-40 ... +65
烘烤至	°C	250 1)

电压供应
At gauge	V (dc)	+15 ... +30
At supply unit with max. cable length (3)	V (dc)	+16 ... +30
Ripple	V (p-p)	≤1

功率消耗	W	≤2

材料		Stainless steel, Al2O3, Ag

(1)无电子磁屏蔽 (2) 250°C在定义的区域中，请参见尺寸 (3) 电源的最小电压必须与传感器电缆的长度成比例地增加

MAG470

MAG470 extended

Measurement range (air, N2)	mbar Torr	5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3

Accuracy
1x10-9 ... 1x10-3 mbar	% of reading	≈±30

Repeatability
1x10-9 ... 1x10-3 mbar	% of reading	≈±5

Temperature
Operation (ambient)	°C	+5 ... +55
Storage	°C	-40 ... +65
Bake-out	°C	250 2)

Supply voltage
At gauge	V (dc)	+15 ... +30
At supply unit with max. cable length (3)	V (dc)	+16 ... +30
Ripple	V (p-p)	≤1

Power consumption	W	≤2

Materials exposed to vacuum		Stainless steel, Al2O3, Ag

(1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

零件号

附件

备件

零件号

附件

备件

零件号

附件

备件

MAG470
Part Number	Description
351-997	MPG401 Maintenance set
351-990	Repair set IKR 060/070/26x/270 MAG470
351-995	MxG40x/50x Spare parts ignition aid (10)
351-994	MPG40x Ignition tool set

MAG470 extended
Part Number	Description
351-990	Repair set IKR 060/070/26x/270 MAG470
351-995	MxG40x/50x Spare parts ignition aid (10)
351-994	MPG40x Ignition tool set
351-997	MPG401 Maintenance set