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气体分析
质谱仪Transpector® MPH
质谱仪
Transpector® MPH
无与伦比的性能提高良率并使正常运行时间最大化
持续上升的硅晶圆价格以及对成品的需求意味着废弃晶圆需要付出前所未有的代价。因此，在半导体制造中心了解过程并监测缺陷也变得更加重要。Transpector MPH 气体分析系统专门用于让您的系统在所有气体分析应用中都实现业内一流的性能，有助于最大限度地提高芯片产量，降低工具停工时间。Transpector MPH 兼具总拥有成本低和平均故障间隔时间长的优点，在帮助您赢利方面的作用优于市面上的任何其他残余气体分析仪 (RGA)。
INFICON 利用在气体分析过程控制设备领域的专长制造的 RGA 具有行业领先的数据采集速度，可检分压强和信噪比最低。所有这些特性都不会牺牲 INFICON Transpector 气体分析仪一贯出色的可靠性。
功能
最大模拟扫描和选定峰值的数据速率为每点 1.8 ms
TCP/IP 以太网连接
双丝极
可现场更换电子倍增器
组合阳极、阴极和反射极丝极套件
较短的传感器可降低安装占地面积
九个数量级的动态量程
<2E-15 Torr 的 MDPP（100 amu）
信噪比更高
可调换传感器和电子元件
传感器在洁净室环境中装配、测试并进行双层包装
符合 RoHS 标准
技术规格
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 100 amu |
| 最小可检测分压 | 2E-15 Torr |
| 灵敏度 (FC) | 6E-4 A/Torr |
| 灵敏度 (EM) | 500 A/Torr |
| 最大工作压力 | 5E-4 Torr |
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 100 amu |
| 最小可检测分压 | 3E-13 Torr |
| 灵敏度 (FC) | 6E-4 A/Torr |
| 灵敏度 (EM) | NA |
| 最大工作压力 | 5E-4 Torr |
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 200 amu |
| 最小可检测分压 | 3E-15 Torr |
| 灵敏度 (FC) | 5E-4 A/Torr |
| 灵敏度 (EM) | 500 A/Torr |
| 最大工作压力 | 5E-4 Torr |
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 200 amu |
| 最小可检测分压 | 4E-13 Torr |
| 灵敏度 (FC) | 5E-4 A/Torr |
| 灵敏度 (EM) | NA |
| 最大工作压力 | 5E-4 Torr |
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 300 amu |
| 最小可检测分压 | 4E-15 Torr |
| 灵敏度 (FC) | 4E-4 A/Torr |
| 灵敏度 (EM) | 250 A/Torr |
| 最大工作压力 | 5E-4 Torr |
MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
| 质量范围 | 300 amu |
| 最小可检测分压 | 5E-13 Torr |
| 灵敏度 (FC) | 4E-4 A/Torr |
| 灵敏度 (EM) | NA |
| 最大工作压力 | 5E-4 Torr |
配件
| 961-021-G1 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug |
| 961-021-G2 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G3 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable |
| 961-021-G4 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug |
| 961-021-G5 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G6 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable |
| 600-1190-P8 | Ethernet 7m cable |
| 600-1190-P15 | Ethernet 15m cable |
| 600-1428-P1 | Power Supply Extension Cable- 15 ft (4.5m) |
| 600-1429-P1 | Power Supply Extension Cable - 30 ft (9m) |
| 961-417-G1 | Ethernet Router 4 port with Push Button Wi-Fi |
| 961-418-G1 | Ethernet Switch 8 port |
| 961-702-G1 | Pirani Interlock Kit |
| 914-024-G1 | Angle Valve Kit, Manual (includes heater) |
| 914-026-G1 | MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater) |
| 961-029-G1 | MPH Heater Kit 120 VAC |
| 961-029-G2 | MPH Heater Kit 230 VAC |
备件
耗材
| 961-700-G1 | Coated Iridium Filament Kit |
| 961-700-G2 | Tungsten Filament Kit |
| 961-701-G1 | Coated Iridium Filament Ion Source |
| 961-701-G2 | Tungsten Filament Ion Source |
| 961-2428-G2 | Electron Multiplier Replacement Kit |
备件
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H1FAS | MPH Sensor, 100 AMU FC (MPH100F) w/ Y2O3/Ir Filaments |
| 961-H1FBS | MPH Sensor, 100 AMU FC (MPH100F) w/ Tungsten Filaments |
| MP-H10S | MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet |
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H1MAS | MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Y2O3/Ir Filaments |
| 961-H1MBS | MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Tungsten Filaments |
| MP-H10S | MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet |
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H2FAS | MPH Sensor, 200 AMU FC (MPH200F) w/ Y2O3/Ir Filaments |
| 961-H2FBS | MPH Sensor, 200 AMU FC (MPH200F) w/ Tungsten Filaments |
| MP-H20S | MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet |
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H2MAS | MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Y2O3/Ir Filaments |
| 961-H2MBS | MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Tungsten Filaments |
| MP-H20S | MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet |
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H3FAS | MPH Sensor, 300 AMU FC (MPH300F) w/ Y2O3/Ir Filaments |
| 961-H3FBS | MPH Sensor, 300 AMU FC (MPH300F) w/ Tungsten Filaments |
| MP-H30S | MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet |
MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
| 961-H3MAS | MPH Sensor, 300 AMU EM/FC (MPH300M) w/ Y2O3/Ir Filaments |
| 961-H3MBS | MPH Sensor 300 AMU EM/FC (MPH300M) w/ Tungsten Filaments |
| MP-H30S | MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet |