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薄膜沉积

传感器和馈入件前装式双传感器

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前装式双传感器

INFICON 前装式双晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。双传感器可提供备用晶体,这对于真空腔室中需要有第二个晶体的关键过程至关重要。

由于采用前装式设计,可以在缺少侧面插入空间的应用中轻松地插入晶体支架。经机械装配而成,而不是焊接在一起,因此,您能够在现场方便地更换其部件(如有必要)。传感器可单独订购,或以传感器/馈入件组合的形式订购,该组合可焊接在一起,或通过压缩接头装配在一起。

功能

  • 双晶体

  • 晶体闸

  • 前装式晶体支架

  • 易于安装

  • 随附 2.54 cm (1 in.) 螺栓馈入装置及 CF40 馈入装置

  • 在配有压缩接头时可调长度

  • 在配有压缩接头或焊接到馈入件时无需铜焊

  • 焊接为客户指定长度的传感器/馈入装置组合

规格

最小水流时的最高工作等温环境温度400 ° C


晶体交换Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders.


水管S-304, 0.125 in. (3.175 mm) OD x 0.015 in. (0.381 mm) Wall thickness seamless stainless steel tubing


1 in. 螺栓和 Ultra-Torr(压缩接头)端接的馈入件规格:
材料304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
温度Operational environment to 300ºC with water cooling or 165° C without
安装1.015 in. ±0.010 in. diameter aperture


附件

配件
耗材
备件
NameDescription
QCM Sensor FeedthroughsQCM Sensor Feedthroughs
配件
耗材
备件
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
配件
耗材
备件
零件编号描述
007-007Retainer spring (for crystal holder)
007-023Ceramic Retainer
750-115-P4Coupling (installs onto bellows assembly)
750-169-P2Bellows assembly (coupling not included)
750-171-P1Finger spring contact
750-172-G1Crystal holder (includes retainer spring)
750-174-P2Female coax
750-175-P1Insulator (underneath leaf spring)
008-007CRYSTAL SNATCHER
750-188-P3Leaf Spring
082-179PEEK screw (for leaf spring)
750-210-G1Shutter module (bellows assembly, shaft assembly, and shutter assembly)
750-215-G1Shaft assembly (part of shutter module)
750-216-G1Shutter assembly (part of shutter module)
750-904-G1Compact Sensor Kit
750-905-G1Large Sensor Kit
In-vacuum cables
321-039-G12In-vacuum cable, 15.2 cm (6 in.)
007-252In-vacuum cable, 30.5 cm (12 in.)
321-039-G11In-vacuum cable, 61.0 cm (24 in.)
007-044In-vacuum cable, 78.1 cm (30.75 in.)
007-059In-vacuum cable, 91.4 cm (36 in.)
007-061In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU